As CMOS scaling progresses, increasing structural aspectratio (AR) and decreasing critical dimensions (CD) pose great challenges formechanical stability and defectivity control. High-AR structures are particularlysusceptible to collapse and damage during processing steps such as etching,cleaning, and drying.
High-throughput SEM-based defectivity inspection toolsproduce large image datasets, requiring automated algorithms for defectextraction and statistical analysis. By correlating these results with CD-SEM,X-SEM, and OCD metrology, stability criteria can be defined for various processconditions. This internship/thesis focuses on developing a data-drivendefectivity analysis pipeline to better understand the mechanical stability ofnanostructures under different process conditions.
Required Skills
Type of internship: Master internship, PhD internship
Duration: >6 month
Required educational background: Physics, Mechanical Engineering, Materials Engineering
Supervising scientist(s): For further information or for application, please contact XiuMei Xu (< E-Mail aus Sicherheitsgründen gelöscht >)
The reference code for this position is 2026-INT-076. Mention this reference code in your application.
Only for self-supporting students.
Applications should include the following information:
Incomplete applications will not be considered.
High-throughput SEM-based defectivity inspection toolsproduce large image datasets, requiring automated algorithms for defectextraction and statistical analysis. By correlating these results with CD-SEM,X-SEM, and OCD metrology, stability criteria can be defined for various processconditions. This internship/thesis focuses on developing a data-drivendefectivity analysis pipeline to better understand the mechanical stability ofnanostructures under different process conditions.
Required Skills
- Strong analytical and programming skills
- Experience with image processing and/orstatistical analysis techniques
Type of internship: Master internship, PhD internship
Duration: >6 month
Required educational background: Physics, Mechanical Engineering, Materials Engineering
Supervising scientist(s): For further information or for application, please contact XiuMei Xu (< E-Mail aus Sicherheitsgründen gelöscht >)
The reference code for this position is 2026-INT-076. Mention this reference code in your application.
Only for self-supporting students.
Applications should include the following information:
- resume
- motivation
- current study
Incomplete applications will not be considered.
